Hiden Analytical EQP-6 is an energy and mass analyzer of ions. It allows to measure energy and mass spectra of ions extracted from a plasma source or created from neutral particles by the instrument's ionisation source. The instrument can be used, for example, to measure the composition of discharge plasmas, partial pressure of gases in a vacuum chamber, energies of ions incident on a growing film or to estimate the plasma potential. The instrument allows time-resolved measurements, so it enables the investigation of  transient phenomena.

The instrument is equipped with the following functional parts:

• system for extraction of ions from plasma
• ionisation source (electron energy up to 150 eV)
• electrostatic field analyser for ion energy filtering (range up to 1000 eV, positive or negative ion detection)
• quadrupole mass filter enabling to filter the particles by mass to charge ratio (up to 300 amu)
• ion detector – secondary electron multiplier (SEM)
• sampling orifice shift (100 mm range)
• DC-biasable sampling orifice